Multi-mode-control apparatus for inner pressure of vacuum chamber and multi-mode-control method for inner pressure of vacuum chamber

ABSTRACT

In combining the master controller and the slave controller, the operation mode is set, and it is made possible to transmit the generated valve opening degree common signal and the generated valve opening degree individual signal from the master controller, corresponding to the operation mode, to the slave controllers that are connected in the sequential daisy-chain style, thereby the slave valves are opening-degree-controlled by any of such generated valve opening degree signals.

TECHNICAL FIELD

The present invention relates to a multi-mode-control apparatus forinner pressure of a vacuum chamber and a multi-mode-control method forinner pressure of a vacuum chamber.

BACKGROUND ART

In the process of manufacturing a panel display substrate such as aliquid crystal (LCD) substrate, predetermined vacuum processing, such asetching processing or film forming processing, is performed on theobject under reduced pressure. As the size of the panel displaysubstrate increases, the manufacturing apparatus is also large-sized,and is required to have a large exhaust capacity while supplying aprocessing gas at a large flow rate to a vacuum chamber, i.e., a processchamber. For this reason, one process chamber becomes to have manyexhaust paths. If the capacity of the processing container is large,controlling the pressure by one control valve causes uneven distributionof pressure inside the process chamber. Because of this, it has beenattempted to equalize the pressure in the process chamber by providing anumber of exhaust paths.

-   Patent literature 1 describes a vacuum processing apparatus, in    which n number of exhaust paths are connected to one process    chamber, each of exhaust paths has individually an evacuation means,    and the conductance of each exhaust paths is controlled with one    controller.-   Patent literature 2 describes a control system. In the system,    discharge paths are provided and each discharge path has fluid    controllers and a pressure detection means. The fluid controllers    are controlled, by the pressure detected with the pressure detection    means, in any one of manners collectively and individually and by    group.-   Patent literature 3 describes a system in which a master valve and a    group of slave valves are coupled through a digital network.-   Patent literature 4 describes a downlink for transmitting data from    a master control unit to slave control units and an uplink for    transmitting data from slave control units to the master control    unit.

LITERATURE OF CONVENTIONAL ART Patent Literature

-   {Patent Literature 1} Japanese patent 5322254-   {Patent Literature 2} Japanese patent 3301042-   {Patent Literature 3} Japanese patent 5123286-   {Patent Literature 4} Japanese patent 6051547

SUMMARY OF INVENTION Technical Problem

As the patent literatures listed above show; it is known that aplurality of exhaust paths are connected to a large-capacity processchamber, the pressure of the exhaust path is detected, and eachcontroller controls the control valve in a multi-mode manner; it is alsoknown to couple a master valve and grouped slave valves through adigital network; it is further known that a downlink technique fortransmitting data from the master control unit to the slave controlunits and an uplink technique for transmitting data from the slavecontrol units to the master control unit.

According to these techniques, each control unit can control the controlvalves in a multi-mode manner, and combining the master valve with thegrouped slave valves eliminates, without providing the pressure detectoron every exhaust path, needs of individually producing control signalson the basis of the detected pressure; thus, the way of control wassimplified.

The multi-mode-control apparatus for inner pressure of a vacuum chamberor the multi-mode-control method for inner pressure of a vacuum chamberby the present invention handles not many control objects but controlsthe pressure of single object inside the process chamber. In combiningthe master valve with the groups of slave valves, the style of thecombination should not to be a fixed combination for a uniform controlover them; the style is required to be versatile configuration withflexibility in the size or the inside configuration of the processingapparatus, or customer's requirements so that it can respond promptly tothe requirements in variety.

Such circumstance has desired an apparatus having configuration suitablefor a multi-mode-control for inner pressure of a vacuum chamber or asuitable method for a multi-mode-control for inner pressure of a vacuumchamber. The desired apparatus having suitable configuration or thesuitable method means a system that does not require interposing workingof a network or other controlling device between the operation of themaster valve and the operation of slave valves, and further means thatthe communication line therein is simplified one and the relationshipbetween the master valve and slave valves thereof are fully utilized.

In view of such points, an object of the present invention is to providea configuration suitable for a multi-mode-control apparatus forcontrolling inner pressure of a vacuum chamber or suitable for amulti-mode-control method for inner pressure of a vacuum chamber. Theinvented configuration does not require interposing a network or othercontroller between the combination of the controller for controlling themaster valve and the controller for the grouped controllers for theslave valves, and the configuration utilizes the relationship betweenthe master device and the slave devices by simplifying the communicationline. Further, the combination of the master valve and the group ofslave valves is configured not for performing a unified control but torespond to the demand on the size and the inside configuration of theprocessing apparatus, or customer's requirements, allowing a promptadaptation to variety of demands.

Means for Solving Problems

The present invention relates to a multi-mode-control apparatus forinner pressure of a process chamber or to a multi-mode-control methodfor inner pressure of a vacuum chamber,

wherein

the process chamber has n number of exhaust paths to vacuum insidethereof (where n is an integer of two or larger), one end of each of theexhaust paths is connected to the process chamber in which an object ofprocessing is to be vacuum treated, control valves are providedindividually on the other end of each of the n number of exhaust paths,and a controller is provided to control the control valves installed onthe exhaust paths;whereinthe multi-mode-control apparatus controls, in multiple modes, theconductance of the exhaust path of the process chamber that has apressure detection means for detecting the inner pressure of the processchamber.

The present invention provides a multi-mode-control apparatus for innerpressure of a process chamber in which an object of processing is vacuumtreated,

wherein

the process chamber has n number of exhaust paths (where n is an integerof two or larger), one end of each of which is connected to the processchamber to vacuum the inside thereof, a control valve is providedindividually on the other end of every exhaust paths of n number;whereina controller is provided to control the control valve, a pressuredetection means is provided to detect the inner pressure of the processchamber, the conductance of the exhaust paths connected to the processchamber is controlled in a multiple control manner;whereinthe multi-mode-control apparatus for inner pressure of the processchamber is characterized in that each one controller provided on everyexhaust path has the same form in terms of the function for transmissionof the valve opening degree signal and the control function of thecontrol valves, the controllers are connected in a sequentialdaisy-chain style, an individual identification code for identifyingeach controller and a group identification code for identifying eachgroup are assigned to each of the exhaust paths of n number, each ofwhich severally has one controller, an arbitrary controller functions asa master controller that generates the pressure control signal for theprocess chamber on the basis of a pressure value detected by thepressure detection means, the other controllers function as slavecontrollers which receive, via the sequential daisy-chain connection,the pressure control signal or the valve opening degree signalequivalent thereto (hereinafter referred to as valve opening degreesignal) generated by the master controller, a communication line isformed from the master controller down to the slave controller locatedon the end;

-   -   in the mode in which the all-group-identification code assigned        in grouping the n number of exhaust paths each severally having        one controller are selected, all the slave controllers are        controlled by the generated valve opening degree signal        transmitted from the master controller via the sequential        daisy-chain connection,    -   in the mode in which the group identification code assigned in        grouping the n number of exhaust paths each severally having one        controller is selected, the slave controller in the selected        group is controlled by the valve opening degree signal generated        by and transmitted from the master controller via the sequential        daisy-chain connection, and the slave controllers in the group        other than the selected group are individually controlled by        respectively generated valve opening degree individual signals        transmitted from the master controller via the sequential        daisy-chain connections,    -   in the mode in which the individual identification code assigned        in grouping is selected, every slave controller is individually        controlled by the valve opening degree individual signals        respectively generated by and transmitted from the master        controller via the sequential daisy-chain connection.

The present invention provides a multi-mode-control apparatus for innerpressure of a process chamber in which an object of processing is vacuumtreated,

wherein

the process chamber has n number of exhaust paths (where n is an integerof two or larger), one end of each of which is connected to the processchamber to vacuum the inside thereof, a control valve is providedindividually on the other end of every exhaust paths of n number, acontroller is provided to control the control valve, and a pressuredetection means is provided to detect the inner pressure of the processchamber, the conductance of the exhaust paths connected to the processchamber is controlled in a multiple control manner;whereinthe multi-mode-control apparatus for inner pressure of a process chamberis characterized in that each controller provided on every exhaust pathhas the same form in terms of the valve opening degree signaltransmission function and the controlling function of the controlvalves, an arbitrary controller functions as a master controller thatgenerates the pressure control signal for the process chamber on thebasis of a pressure value detected by the pressure detection means, theother controllers function as slave controllers which receives, via thesequential daisy-chain connection, the valve opening signal generated bythe master controller, a communication line is formed from the mastercontroller down to the slave controller located on the end, the mastercontroller generates the valve opening degree common signal that is tobe transmitted commonly to controllers of all the slaves or to thegrouped controllers and generates the valve opening degree signal to betransmitted individually to controllers of all the salve controllers orto the grouped controllers, and the slave controller is controlled by avalve opening degree signal comprising either the generated valveopening degree common signal or the generated valve opening degreeindividual signal.

The present invention provides a multi-mode-control method for innerpressure of a process chamber in which an object of processing is vacuumtreated,

wherein

the process chamber has n number of exhaust paths (where n is an integerof two or larger), one end of each of which is connected to the processchamber to vacuum the inside thereof,

wherein,

a control valve is provided individually on the other end of everyexhaust paths of n number;

wherein

a controller is provided to control the control valve, a pressuredetection means is provided to detect the inner pressure of the processchamber, the conductance of the exhaust paths connected to the processchamber is controlled in a multiple control manner;whereinthe multi-mode-control method for controlling inner pressure of aprocess chamber is characterized in that each controller provided onevery exhaust path has the same form in terms of the valve openingdegree signal transmission and the controlling of the control valves, anarbitrary controller functions as a master controller that generates thevalve opening degree signal for the process chamber on the basis of apressure value detected by the pressure detection means, the otherremaining controllers function as slave controllers that is controlledby the valve opening degree signal generated by and transmitted from themaster controller, receiving via the sequential daisy-chain connection,a communication line is formed from the master controller down to theslave controllers located on the end, multiple combinations of themaster controller and every slave controller is made settable, anoperation mode is provided that allows manipulating the opening degreeof n number of control valves, a selection means for selecting theoperation mode is provided, one combination of the master controller andthe slave controller is set for every selected operation mode, the valveopening degree signal of either the generated valve opening degreecommon signal or the generated valve opening degree individual signal istransmitted to the slave controller on the basis of the set operationmode.

Advantageous Effect of Invention

In one aspect of the present invention, multiple combinations of themaster controller and every slave controller is made settable, anoperation mode is provided that allows manipulating the opening degreeof n number of control valves, a selection means for selecting theoperation mode is provided, one combination of master controller andslave controller is set for every selected operation mode, and the valveopening degree signal of either the generated valve opening degreecommon signal or the generated valve opening degree individual signal istransmitted to the slave controller on the basis of the set operationmode.

Thereby, a configuration suitable for a multi-mode-control apparatus forinner pressure of a vacuum chamber or a configuration suitable for amulti-mode-control method for inner pressure of a vacuum chamber isprovided. The provided configuration does not require interposing anetwork or other controlling device between the combination of thecontroller for controlling the master valve and the grouped controllersfor controlling the slave valves and the configuration utilizes therelationship between the master device and the slave devices bysimplifying the communication line. Further, the combination of themaster valve and the slave valves is configured, not for performing aunified control but to respond to the demand on the size and the insideconfiguration of the processing apparatus, or customer's needs, allowinga prompt adaptation to variety of demands.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 This is a diagram showing a schematic configuration of a knowngeneral substrate processing system to which an embodiment of thepresent invention is applied.

FIG. 2 This is a diagram showing a schematic configuration of anembodiment of the present invention.

FIG. 3 This is a diagram showing the concept shown in FIG. 2 in a morespecific configuration.

FIG. 4 This is a diagram showing a multi-mode-control in a vacuumchamber inner pressure multi-mode-control apparatus in an operationmode.

FIG. 5 This is a diagram showing an example in which an identificationcode is assigned to a master valve and slave valves so that theidentification code can be selected in accordance with an operationmode.

FIG. 6 This is a diagram showing a function of each controller andexecution of function selection.

MODES OF CARRYING OUT THE INVENTION

FIG. 1 is a diagram showing a schematic configuration of a known generalsubstrate processing system to which an embodiment of the presentinvention is applied.

FIG. 1 shows a known general substrate processing system 200 forprocessing a substrate 220 such as a semiconductor substrate or a liquidcrystal substrate which is conveyed-in. The substrate processing system200 includes, from the upstream side to the downstream side, a load lockchamber 201 on the upstream side, that is, before processing, a processchamber 202, and a load lock chamber 203 on the downstream side, thatis, after the processing. At the entrance of the load lock chamber 201on the upstream side, a door valve 204 is provided. Between the loadlock chamber 201 on the upstream side and the process chamber 202, andbetween the process chamber 202 and the load lock chamber 203 on thedownstream side, a gate valves 205 and 206 are provided. In theprocessing chamber 202, a plurality of pressure control valves 210 areprovided, and, corresponding to the plurality of pressure control valve210, a plurality of vacuum pumps 233 are provided.

Both the load chambers 201 and 203 have vacuum pumps 231 and 232, andthe vacuum valves 233 and 234 are provided in combination with thevacuum pumps 231 and 232. The vacuum valves 233 and 234 are operatedonly for open and close. The door valves 204 and 207 can be handled asgate valves.

The load lock chambers 201 and 203, and the process chamber 202 areevacuated with the vacuum pumps 213, 232, and 233 for processing thesubstrate 220; and a predetermined processing is performed in eachchamber. The pressure controlling inside the chamber is performed bycontrolling the pressure control valve 210.

Both the load lock chambers 201 and 203, and the process chamber 202 areequipped correspondingly with the pressure gauges 241, 242, and 243.

In the substrate processing system 200 shown in FIG. 1, the presentinvention relates to a multi-mode-control of a plurality of pressurecontrol valves 210 provided on the process chamber 202 and to amulti-mode-control of a plurality of vacuum pumps 231 providedcorresponding to the plurality of pressure control valves 210.

As shown in FIG. 2, the multi-mode-control apparatus for inner pressureof the vacuum chamber 100 is provided, which performs the pressurecontrol inside the process chamber in a multiple mode. In this example,the process chamber 202 in FIG. 1 is illustrated in FIG. 2 as a processchamber 1 as a vacuum chamber.

On the process chamber 1 as a vacuum chamber (corresponds to the processchamber 202 in FIG. 1), a multi-mode-control apparatus for innerpressure of a vacuum chamber is configured,

wherein

n number of the exhaust paths (where n is an integer of two or larger),one end of each path is connected to the process chamber 1 forevacuation of the inside of the process chamber, are provided; a controlvalve 2 (corresponds to the pressure control valve 210 in FIG. 1) isinstalled individually on every exhaust path and the control valve 2 isconnected to the other end of each exhaust path; and a controller 3 thatcontrols the control valve 2 is provided;whereinthe conductance of the exhaust path of the vacuum process chamber 1provided with a gauge 4 as a pressure detection means for detection theinner pressure of the process chamber is controlled in amulti-mode-control manner. Hereinafter, when referring to the functionof the control valve 2 provided on every exhaust passage, among controlvalves 2, a valve to be controlled by the master controller will bereferred to as the master valve and those to be controlled by the slavecontroller will be referred to as the slave valves.

In the multi-mode-control apparatus for inner pressure of vacuum chamber100, controllers 3 individually provided by one on every exhaust pathhave the same structural configuration, and their functions for thepressure control signal transmission (i.e., a valve opening degreesignal transmission function) and their functions for the controllingthe control valve 2 that controls the inner pressure of the processchamber are the same.

With this configuration, an arbitrary controller 3 functions as a mastercontroller 31 to generate a pressure control signal, and all the othercontrollers 33, 34, 35, 36, - - - (N) function as slave controllersreceiving the generated pressure control signal via a sequentialdaisy-chain connection.

The daisy-chain connection means a series connection of controllers 31,32, 34, 35, 36, - - - , (N) by a communication line. The mastercontroller 31 controls a master valve 41 by the generated pressurecontrol signal, and the slave controllers 32, 33, 34, 35, 36, - - - ,(N) slave valves 42, 43, 44, 45, 46, - - - , (N) respectively, by thegenerated pressure control signal.

Each one controller provided individually on every exhaust path has thesame form in terms of the functions for transmission of the pressurecontrol signal and in the control function for the control valve. Themaster controller 31 is connected to a Programmable Logic Controller(PLC) 50, and into which the pressure value detected by the pressuredetection means and the target value of the inner pressure of theprocessing container are input. A communication line is formed from themaster controller down to the slave controller located on the end. Anupper controller to which the master controller 31 is connected is notlimited to a PLC but other controllers and the like may be used in somecases.

In this configuration example therefore, the controller with the numeral31 functions as a master controller. However, any one of controllersindicated with numerals 32, 33, 34, 35, 36, - - - , (N) may be used asthe master controller, assigning the other controller as slavecontrollers.

FIG. 3 is a diagram showing the concept shown in FIG. 2 in a morespecific configuration.

FIG. 3 illustrates controllers 31, 32, 33, . . . , 37 and the mastervalve 41 and slave valves 42, 43, . . . , 47. Though not shown in thefigure, other than controllers 31, 32, 33, . . . , 37, controllers 34,35, 36, . . . (N) are provided. Each controller as an APC controller hasthe same structural configuration. Further, the master valve 41 andslave valves 42, 43, . . . , 47 have the same structural configuration.As shown in FIG. 3, the controllers 31, 32, 33, 34, 35, 36, . . . , (N),the master valve 41, and the slave valves 42, 43, 44, 45, 46, . . . ,(N) have the same structural configuration.

All the controllers are connected sequentially in a daisy-chain style,and n number of exhaust paths, each of which has one controller, areseverally given an identification code to be individually identified anda group identification code when grouped.

The arbitrary controller functions as a master controller for generatinga pressure control signal of the processing chamber on the basis of thepressure value detected by the pressure detection means, and othercontrollers function as slave controllers to which the pressure controlsignal generated by the master controller is transmitted via thesequential daisy-chain connection.

The communication line is formed from the master controller down to theslave controller located on the end. The generated pressure controlsignal is transmitted down to the slave controller located on the end ofthe communication line.

In FIG. 3, the master controller 31 is shown as the APC controller(Master); likewise, the slave controllers 32, 33, and 37 are referred toas the APC controller (Slave 1), the APC controller (Slave 2), the APCcontroller (Slave 7), and so on. Thus, it is shown that each controllercan be controlled in a unified manner by the pressure control signalgenerated by the master controller.

As shown in FIG. 3, each of controllers 31, 32, 33, 34, 35, 36, . . . ,(N) has an I/O (51) which is an access port connectable to the PLC 50, aCOM1 (52), a COM2 (52), and a COM2 (53); a VALVE 54 which is aconnecting port connectable to the control valve 2; and a Power 55 whichis a connecting port connectable to the power supply. These componentsare formed on substrates 61, 62, 63, . . . , (M). Further, Gauges thatare connecting ports connectable to the Gauge 4 are formed on substrates61, 62, 63, - - - , (M).

The substrates 61, 62, 63, . . . , (M) comprising those components: theI/O (51), COM1 (52), and COM1 (53); the VALVE 54; the Power 55 that arethe connecting ports; and either one of the Gauge connecting ports 71,72, 73, . . . , (M′), are constructed to have the same structure andform, and which substrate is to be the slave controller is arbitrary.

In this example, only the Gauge 71 provided on the substrate 61 of themaster controller 31 is used.

A power supply 59 is connected to each of Powers 55. The exhaust pathcan be connected up to a maximum of 15, and the control valve 2 isinstalled on each exhaust path, and up to a maximum of 14 slavecontrollers 3 are juxtaposed. Maximum 15 units including the mastercontroller are connected in a daisy-chain style.

Arbitrary controller, adapted to function as a master controller, takesin necessary data from the PLC, and generates the pressure controlsignal for controlling the slave controller. For this reason, eachcontroller has sufficient processing capability to generate a pressurecontrol signal. The computed and generated pressure control signal istransmitted from the master controller to the slave controller via thesequential daisy-chain connection over the communication line 40, andthen the degree of opening of each control valve is set. Thecommunication line 40 transmits signals bidirectionally as indicatedwith arrows in the figure.

A typical signal of the generated pressure control signal is the valveopening degree signal. Therefore, the master controller computes theopening degree of each valve. The calculated data of the valve openingdegree signal is transmitted to the slave controllers via thecommunication line 40 as the generated pressure control signal. Whenviewed from the slave controller, this means that the pressure controlsignals generated by the master controller are sequentially transmitted.The pressure control signal can be replaced with the valve openingdegree signal, which has an equivalent signal nature. Hereinafter, theexplanation will be made using the valve opening degree signal. Whenviewed from the slave controller, it therefore means that valve openingdegree signals generated by the master controller are sequentiallytransmitted.

The Gauge 4 detects the state of the pressure inside the processchamber, and the detection data is input in the master controller 31 tobe used for processing.

As described above, the multi-mode-control apparatus for inner pressureof the vacuum chamber includes the PLC 50, wherein the PLC 50 makes thearbitrary controller connected to the PLC 50 to function as the mastercontroller in accordance with the input command, and the othercontrollers are made to function as slave controllers, to which thegenerated pressure control signal is transmitted from the mastercontroller via the sequential daisy-chain connection.

In the viewpoint from operation, it can be said that the slave valvesare following the Master valve, (70).

The method for control from the PLC 50 is implemented, using RS-322command, corresponding to linear control with analog DC input-output andto input-output with Hi-Lo signal.

FIG. 4 is a diagram showing the operation mode of the multi-mode-controlapparatus for inner pressure of the vacuum chamber. As a plurality ofoperation modes is settable, various multi-mode-control can beperformed.

FIG. 4 shows a state in which e.g.-1, e.g.-2, e.g.-3, and e.g.-4 havebeen set as the operation mode. The setting is not limited to the shownfour modes of e.g.-1, e.g.-2, e.g.-3, and e.g.-4.

When the operation mode is e.g.-1, the master controller 31 having amaster function generates the valve opening degree signal, and issuesthe generated valve opening degree signal command. This command issequentially transmitted to the slave controllers 32, 33, 34, 35, - - -(N) via the communication line 40.

The slave controllers 32, 33, 34, 35, - - - , (N), which have receivedthe command of the generated pressure control signal, receive thecontrol signal almost in synchronization with the master controller 31,and are able to transmit almost in synchronization with that receptionthe command of the generated valve opening degree signal to the adjacentcontroller. This aspect is expressed as being synchronized by a mastervalve (SMV). The master controller 31 and slave controllers 32, 33, 34,35, . . . , (N) drive each control valve to the opening degree settingposition on the basis of the pressure control signal, which is theopening degree command generated by and received from the mastercontroller 31.

The time difference between the operation of the master valve by themaster controller 31 and the operation of the slave valve by the slavecontrollers 32, 33, 34, 35, . . . , (N) is as extremely small as 50 msor less, usually within 20 ms. It is therefore expressed here assynchronous control (SMV). Therefore, in this embodiment, thesynchronous control means that the operation is controlled within anordinary very small timing difference.

Using one master controller 31 and 14 units of slave controllers 32, 33,34, 35, . . . , (N), as the maximum number of 15 devices, for oneprocess chamber 1 of large capacity, the synchronized control of theopening degree position control and the pressure control is achieved.

The operation mode e.g.-2 and the operation mode e.g.-3 indicate modeswhere only the arbitrary slave valve undergoes the opening degreeposition control to be at the position of the arbitrary valve openingdegree demanded by the dedicated Hold Command.

The operation mode e.g.-2 exhibits a case where the slave valve 42undergoes the individual-close control, the slave valve 43 SMV, theslave valve 44 the individual-close control, and the slave valve 45 SMVcontrol.

The operation mode e.g.-3 exhibits a case where the slave valve 42undergoes the individual opening degree position control with 50%-open,the salve valve 43 SMV, the slave valve 44 SMV, and the slave valve 45the individual opening degree position control with 30%-open. Whichslave valve is to undergo SVM, the individual opening control with50%-open, or the individual opening degree position with 30%-open isdetermined in accordance with the characteristics of the process chamberor the needs of the user.

The operation mode e.g.-4 exhibits a mode where all the slave valves areseparated by inputting the dedicated Hold Command and thereby the valveopening degree position is controlled to the arbitrary valve openingdegree position.

In the operation mode e.g.-4, the master valve 41, the slave valve 42,the slave valve 43, the slave valve 44, and the slave valve 45 arecontrolled by the individually generated valve opening degree signal.

With the present embodiment, it is possible to operate individually eachslave valve.

The process chamber has individuality in the configuration andarrangement of its internal devices, and therefore an individual controlin accordance with their particularity is required for controlling theinner pressure. By knowing the individuality of each process chamber inadvance, a control method suitable to the individuality is employed.Since the multi-mode-control apparatus for inner pressure of vacuumchamber or the multi-mode-control method for inner pressure of vacuumchamber has a selection means for selecting the operation mode,configuring them becomes practicable by identifying the valve openingdegree signal for controlling the slave controller as the generatedvalve opening degree common signal or as the generated valve openingdegree individual signal.

In FIG. 4, the operation modes are shown from the operation mode e.g.-1to the operation mode e.g.-4. The operation mode e.g.-2 and theoperation mode e.g.-3 however can be appropriately modified.

The multi-mode-control apparatus for inner pressure of vacuum chamber orthe multi-mode-control method for inner pressure of vacuum chamber makesit possible to transmit the pressure control signal from the mastercontroller to slave controllers as signals of both the generated valveopening degree common signal and the generated valve opening degreeindividual signal. The master controller controls a valve opening degreesignal of the pressure control signal comprising either the generatedvalve opening degree common signal or the generated valve opening degreeindividual signal.

FIG. 5 is a figure to describe an example in which the master valve andthe slave valves are given identification codes to permit choosingidentification code corresponding to the operation mode.

In order to simplify which operation mode is adopted, by storing theseoperation modes in the PLC, individual identification codes and groupidentification codes when grouped may be given to the slave valve 44 andthe slave valve 45 in accordance with the operation mode. In the casesof the operation modes from e.g.-1 to e.g.-3, the group identificationcode is given, and in the case of the operation mode e.g.-4, theindividual identification code is assigned. By setting the codes in thisway, it becomes possible to freely select the selection direction A andthe selection direction B and to set the operation mode. The way ofsetting the identification codes is however not limited to theabove-stated method.

FIG. 6 is a diagram showing the function of each controller and doingthe function selection.

As stated above, each controller 3 provided on every exhaust path hasthe same form in terms of the function for transmission of the valveopening degree signal and the control function of the control valve 2that controls the inner pressure of the process chamber. These functionsare automatically selected corresponding to the operation mode, andvarious controls shown in FIG. 4 are performed.

In the cases of the operation mode from the operation mode e.g.-1 to theoperation mode e.g.-3, the valve opening degree signal from the mastercontroller 31 is sequentially transmitted via the daisy-chain connectionby the valve opening degree signal transmission function.

Also, in the cases of the operation mode e.g.-2 and the operation modee.g.-3, the valve opening degree signal transmission functionsequentially transmits the valve opening degree signal from the mastercontroller 31 via the daisy-chain connection. In these cases, the schemeof controlling the slave valves is respectively set in accordance withthe operation mode. Similarly, in the operation mode e.g.-4, the valveopening degree signal generated from the master controller 31 issequentially transmitted via the daisy-chain connection by the valveopening degree signal transmission function; the valve opening degreesignal however is not acquired but the control is performed in theoperation mode in accordance with the generated and transmittedindividual valve opening degree signal.

The controllers are connected sequentially in a daisy-chain style andthe n number of the exhaust paths each having one controller are givenindividual identification codes to be individually identified and agroup identification code when grouped, the operation mode is set on nnumber of the exhaust paths, the individual identification code and thegroup identification code assigned to each of the controllers on each ofthe n number of exhaust paths are selected and identified in accordancewith the operation mode, and the control valves can be controlled by therespective controllers.

In this figure, it is described that all the slave valves aredaisy-chain connected, but it may be practicable to configure makingsome slave valves operable independently without connecting to suchdaisy-chain. In such case of configuration, the present embodimentrelates to a control scheme wherein a plurality of controllers areconnected in daisy-chain style.

As stated above, the arbitrary controller is connected to the upper PLCwhich generates the pressure control signal for the process chamber onthe basis of the pressure value detected with the pressure detectionmeans, and such arbitrary controller connected to the upper PLCfunctions as the master controller. The valve opening degree signal istransmitted from the master controller to the remaining othercontrollers via the sequential daisy-chain connection, which othercontrollers function as slave controllers for follow-transmission of thevalve opening degree signal,

wherein,

-   -   in the mode in which the all-group-identification codes assigned        in grouping the n number of exhaust paths each severally having        one controller are selected, all the slave controllers are        controlled with the generated valve opening degree signal        transmitted from the master controller via the sequential        daisy-chain connection;    -   in the mode in which the group identification code assigned in        grouping the n number of exhaust paths each severally having one        controller is selected, the selected slave controller is        controlled with the valve opening degree signal generated by and        transmitted from the master controller via the sequential        daisy-chain connection; and    -   in the mode in which the individual identification code assigned        in grouping is selected, all the controllers are individually        controlled by the valve opening degree signals respectively        generated.

There provided the PLC and the arbitrary controller to which the PLC isconnected, and the PLC makes the connected controller function as themaster controller and further makes other controllers function as theslave controllers.

It is possible to set a plurality of operation modes and to set aplurality of schemes of combination of the master controller and slavecontrollers in accordance with that set operation modes.

Thus, the multi-mode-control method for inner pressure of the vacuumchamber is configured, which includes such aspect that the operationmode is set on the combination of controllers provided on the n numberof exhaust paths on the basis of the input operation signal, and eachcontroller controls the control valve corresponding to the set operationmode.

According to the present embodiment, the following configuration isprovided.

Each of the controllers provided on every exhaust path has the same formin terms of the transmission of the valve opening degree signal and thecontrol function of the control valve.

Controllers are connected in a sequential daisy-chain style, and each ofn number of the exhaust paths is provided with one controller and isgiven an individual identification code to be individually identifiedand a group identification code when grouped.

Arbitrary controller functions as the master controller that generatesthe valve opening degree signal of the vacuum chamber on the basis ofthe pressure value detected by the pressure detection means, and othercontrollers function as slave controllers to which the generated valveopening degree signal is transmitted from the master controller via thesequential daisy-chain connection, wherein the communication line isformed from the master controller down to the slave controller locatedon the end.

-   -   In the mode in which the group identification code assigned in        grouping the n number of exhaust paths each having one        controller is selected, all the slave controllers are controlled        by the valve opening degree signal generated by and transmitted        from the master controller via the sequential daisy-chain        connection.    -   In the mode in which the group-identification codes assigned in        grouping the n number of exhaust paths each having one        controller are selected, the slave controller in the selected        group is controlled by the generated valve opening degree signal        generated by and transmitted from the master controller via the        sequential daisy-chain connection, and the slave controller in        the selected other group is individually controlled with the        generated valve opening degree individual signal generated by        and transmitted from the master controller via the sequential        daisy-chain connection.    -   In the mode in which the individual identification code        assigned, in grouping case, is selected, all the slave        controllers are individually controlled by the valve opening        degree signals respectively generated by and transmitted from        the master controller via the sequential daisy-chain connection.

In addition, the multi-mode-control apparatus for inner pressure ofvacuum chamber or the multi-mode-control method for inner pressure ofvacuum chamber described below is configured.

The master controller generates a pressure control signal which iscommonly transmitted to all the slaves or grouped controllers, and thevalve opening degree signal which is transmitted individually to all theslave or grouped controllers. The slave controller is controlled by avalve opening degree signal of the pressure control signal comprisingeither the generated valve opening degree common signal or the generatedvalve opening degree individual signal.

A plurality of combinations can be set between the master controller andall the slave controllers.

An operation mode for operating the opening degree of the n number ofcontrol valves is provided, and selection means for selecting theoperation mode is provided. One combination of the master controller andthe slave controller is set for every selected operation mode, andeither the generated valve opening degree common signal or the generatedvalve opening degree individual signal is transmitted to the slavecontroller on the basis of the selected operation mode.

According to the present embodiment, it is made possible to set aplurality of combinations between the master controller and all theslave controllers.

An operation mode for operating the opening degree of the n number ofcontrol valves is provided, and selection means for selecting theoperation mode is provided. One combination of the master controller andthe slave controller is set for each selected operation mode, and eitherthe generated valve opening degree common signal or the generated valveopening degree individual signal can be transmitted to the slavecontroller on the basis of the selected operation mode.

Thereby, a configuration suitable for a multi-mode-control apparatus forinner pressure of a vacuum chamber or suitable for a multi-mode-controlmethod for inner pressure of a vacuum chamber is provided. The providedconfiguration does not require interposing a network or othercontrolling device between the combination of the controller forcontrolling the master valve and the group of controllers forcontrolling the slave valves and the configuration utilizes therelationship between the master device and the slave devices bysimplifying the communication line. Further, the combination of themaster valve and the slave valves is configured, not for performing aunified control but to respond to the demand on the size and the insideconfiguration of the processing apparatus, or customer's needs, allowinga prompt adaptation to variety of demands.

REFERENCE SIGNS LIST

 1 Process chamber  2 Control valve  3 Controller  4 Gauge 31 Mastercontroller (APC controller, master) 32, 33, 34, 35, 36 Slave controllers(APC controller, slave) 40 Communication line 41 Master valve 42, 43,44, 45, 46 Slave valves 50 Programmable logic controller (PLC) 51 I/Oport connectable to PLC 50 52 COM1 53 COM2 54 Valve port connectable tocontrol valve 2 55 Power port connectable to power supply 61, 62, 63Substrates 70 Following form 71, 72, 73, - - - , (M) Gauge connectionports 100  Multi-mode-control apparatus for inner pressure of vacuumchamber

The invention claimed is:
 1. A multi-mode-control apparatus for innerpressure of a process chamber in which an object of processing is vacuumtreated, wherein the process chamber has n number of exhaust paths(where n is an integer of two or larger), one end of each of which isconnected to the process chamber to vacuum the inside thereof, a controlvalve is provided individually on the other end of every exhaust pathsof n number, a controller is provided to control the control valve, apressure detection means is provided to detect the inner pressure of theprocess chamber, the conductance of the exhaust paths connected to theprocess chamber is controlled in a multiple control manner; wherein themulti-mode-control apparatus for inner pressure of the process chamberis characterized in that each one controller provided on every exhaustpath has the same form in terms of the function for transmission of thevalve opening degree signal and the control function of the controlvalves, the controllers are connected in a sequential daisy-chain style,an individual identification code for identifying each controller and agroup identification code for identifying each group are assigned toeach of the exhaust paths of n number, each of which severally has onecontroller, an arbitrary controller functions as a master controllerthat generates the valve opening degree signal for the process chamberon the basis of a pressure value detected by the pressure detectionmeans, the other controllers function as slave controllers whichreceive, via the sequential daisy-chain connection, the valve openingdegree signal generated by the master controller, a communication lineis formed from the master controller down to the slave controllerlocated on the end, in the mode in which the all-group-identificationcode assigned in grouping the n number of exhaust paths each severallyhaving one controller are selected, all the slave controllers arecontrolled by the generated valve opening degree signal transmitted fromthe master controller via the sequential daisy-chain connection, in themode in which the group identification code assigned in grouping the nnumber of exhaust paths each severally having one controller isselected, the slave controller in the selected group is controlled bythe valve opening degree signal generated by and transmitted from themaster controller via the sequential daisy-chain connection, and theslave controllers in the group other than the selected group areindividually controlled by the respectively generated valve openingdegree individual signals transmitted from the master controller via thesequential daisy-chain connections, in the mode in which the individualidentification code assigned in grouping is selected, every slavecontroller is individually controlled by the valve opening degreeindividual signals respectively generated by and transmitted from themaster controller via the sequential daisy-chain connection.
 2. Amulti-mode-control apparatus for inner pressure of a process chamber inwhich an object of processing is vacuum treated, wherein the processchamber has n number of exhaust paths (where n is an integer of two orlarger), one end of each of which is connected to the process chamber tovacuum the inside thereof, a control valve is provided individually onthe other end of every exhaust paths of n number, a controller isprovided to control the control valve, a pressure detection means isprovided to detect the inner pressure of the process chamber, theconductance of the exhaust paths connected to the process chamber iscontrolled in a multiple control manner; wherein the multi-mode-controlapparatus for inner pressure of a process chamber is characterized inthat each controller provided on every exhaust path has the same form interms of the valve opening degree signal transmission function and thecontrolling function of the control valves, an arbitrary controllerfunctions as a master controller that generates the pressure controlsignal for the process chamber on the basis of a pressure value detectedby the pressure detection means, the other controllers function as slavecontrollers which receives, via a sequential daisy-chain connection, thevalve opening degree signal generated by the master controller, acommunication line is formed from the master controller down to theslave controllers located on the end, the master controller generatesthe valve opening degree common signal that is to be transmittedcommonly to controllers of all the slaves or to the grouped controllersand generates the valve opening degree signal to be transmittedindividually to controllers of all the slave controllers or to thegrouped controllers, and the slave controller is controlled by a valveopening degree signal comprising either the generated valve openingdegree common signal or the generated valve opening degree individualsignal.
 3. A multi-mode-control method for inner pressure of a processchamber in which an object of processing is vacuum treated, wherein theprocess chamber has n number of exhaust paths (where n is an integer oftwo or larger), one end of each of which is connected to the processchamber to vacuum the inside thereof, a control valve is providedindividually on the other end of every exhaust paths of n number, acontroller is provided to control the control valve, a pressuredetection means is provided to detect the inner pressure of the processchamber, the conductance of the exhaust paths connected to the processchamber is controlled in a multiple control manner; wherein themulti-mode-control method for controlling inner pressure of a processchamber is characterized in that each controller provided on everyexhaust path has the same form in terms of the valve opening degreesignal transmission and the controlling of the control valves, anarbitrary controller functions as a master controller that generates thevalve opening degree signal for the process chamber on the basis of apressure value detected by the pressure detection means, the otherremaining controllers function as slave controllers that are controlledby the valve opening degree signal generated by and transmitted from themaster controller, receiving via a sequential daisy-chain connection, acommunication line is formed from the master controller down to theslave controller located on the end, multiple combinations of the mastercontroller and every slave controller is made settable, an operationmode is provided that allows manipulating the opening degree of n numberof control valves, a selection means for selecting the operation mode isprovided, one combination of the master controller and the slavecontroller is set for every selected operation mode, the valve openingdegree signal of either the generated valve opening degree common signalor the generated valve opening degree individual signal is transmittedto the slave controller on the basis of the set operation mode.